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. 1990 Jul 23;65(4):504-507.
doi: 10.1103/PhysRevLett.65.504.

Mechanism of HF etching of silicon surfaces: A theoretical understanding of hydrogen passivation

GW Trucks, K Raghavachari, GS Higashi, YJ Chabal

Mechanism of HF etching of silicon surfaces: A theoretical understanding of hydrogen passivation

GW Trucks et al. Phys Rev Lett. .
No abstract available

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