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. 2000 Feb;82(1-4):17-21.
doi: 10.1016/s0304-3991(99)00155-2.

Multiple-input microcantilever sensors

CL Britton Jr  1 , RL Jones, PI Oden, Z Hu, RJ Warmack, SF Smith, WL Bryan, JM Rochelle
Affiliations

Multiple-input microcantilever sensors

CL Britton Jr et al. Ultramicroscopy. 2000 Feb.

Abstract

A surface-micromachined micro-electro-mechanical-system (MEMS) process has been used to demonstrate multiple-input chemical sensing using selectively coated cantilever arrays. Cantilever motion due to absorption-induced stress was readout using a custom-designed, eight-channel integrated circuit. Combined hydrogen and mercury vapor detection was achieved with a palm-sized, self-powered module with spread-spectrum telemetry reporting.

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