Evaluation of a hybrid pixel detector for electron microscopy
- PMID: 12524196
- DOI: 10.1016/s0304-3991(02)00336-4
Evaluation of a hybrid pixel detector for electron microscopy
Abstract
We describe the application of a silicon hybrid pixel detector, containing 64 by 64 pixels, each 170 microm(2), in electron microscopy. The device offers improved resolution compared to CCDs along with faster and noiseless readout. Evaluation of the detector, carried out on a 120 kV electron microscope, demonstrates the potential of the device.
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