Effects of incidence angles of ions on the mass resolution of an energy compensated 3D atom probe

Abstract

We have used a first-order reflectron lens in an optical tomographic atom probe in order to improve the mass resolution. Calculations have been performed to determine the effect of second-order errors in ion energy and incidence angle on the performance of the lens. By applying a correction procedure based on the results of these calculations, we have been able to improve experimental mass resolution by 30%.