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. 2004 Jul;21(7):1186-91.
doi: 10.1364/josaa.21.001186.

Diffraction-based solid immersion lens

Robert Brunner  1 , Matthias Burkhardt, Alexander Pesch, Oliver Sandfuchs, Margit Ferstl, Sungchul Hohng, Jeffrey O White
Affiliations

Diffraction-based solid immersion lens

Robert Brunner et al. J Opt Soc Am A Opt Image Sci Vis. 2004 Jul.

Abstract

A solid immersion lens based on diffraction (dSIL) is proposed as an alternative to the conventional design based on refraction. A design analogous to a Fresnel zone plate is derived in accordance with the Huygens-Fresnel principle. Fabrication of a binary dSIL is achieved by electron-beam lithography and reactive-ion etching on LaSF35, with index n = 2.014. Measurement of the point-spread function is performed with near-field optical microscopy. The results are in accord with the expected resolution enhancement of a factor n with respect to the diffraction limit.

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