Simulation and fabrication of subwavelength structures for a nanometer feature enabling lens-less laser writers

Abstract

A set-up was proposed to propagate submicrometer light beams without resorting to the conventional approach of using a lens. The main target was to develop a method of either by passing or circumventing the diffraction limit to develop a new optical head for a laser writer system with submicrometer resolution. Starting from using surface plasma theory to explain the mechanism of extraordinary transmission phenomenon, we move to discuss the fabrication processes for free-standing metal films and the corresponding transmission light beam images in the far field. A finite difference time domain (FDTD) method was adopted to simulate the electromagnetic field distribution of transmission light beams from the near field to the far field. The experimental results confirm that surface structures on the incident side of incoming light beams can excite surface plasma and enhance the throughput energy of transmission light beams. In addition, we also established that surface structures on the exit side can suppress the diffraction effect and make transmission light beams directional. The experimental and simulation results were found to agree well with each other, which validates the effectiveness of the FDTD simulation approach. As a free-standing film was too fragile to be of practical use, a proposition to develop a substrate-based nanostructured film to ease the construction of an optical head for a laser writer was developed.