Fabry-Perot metrology for displacements up to 50 mm

Abstract

A system designed to apply Fabry-Perot interferometry to the measurement of displacements is described. Two adjacent modes of a Fabry-Perot cavity are probed, and both the absolute optical frequencies and their difference are used to determine displacements via changes in cavity length. Light is coupled to the cavity via an optical fiber, making the system ideal for remote sensing applications. Continuous interrogation is not necessary, as the cavity length is encoded in the free spectral range. The absolute uncertainty is determined to be below 10 pm, which for the largest displacement measured corresponds to a relative uncertainty of 4 x 10(-10). To my knowledge this is the smallest relative uncertainty in a displacement measurement ever demonstrated.