Focused ion beam nanofabrication: a comparison with conventional processing techniques

Abstract

Focused ion beam and dual platform systems are versatile tools for nanoengineering and nanoscience applications. These systems complement conventional processing methods and can be used to prototype and modify a diverse range of nano-devices and sensors. This article discusses FIB nanofabrication and compares it with other fabrication techniques such as electron beam lithography and reactive ion etching. Aspects such as the minimum feature size and side wall profiles are discussed and compared. In addition, the limitations and detrimental effects of FIB processes are discussed.