Morphology phase diagram of ultrathin anatase TiO2 films templated by a single PS-b-PEO block copolymer

Abstract

Ultrathin TiO2 films showing rich morphologies are prepared on Si(100) substrates using sol-gel chemistry coupled with an amphilic polystyrene-block-poly(ethylene oxide) (PS-b-PEO) diblock copolymer as a structure-directing agent. The block copolymer undergoes a good-poor solvent pair induced phase separation in a mixed solution of 1,4-dioxane, concentrated hydrochloric acid (HCl), and titanium tetraisopropoxide (TTIP). By adjusting the weight fractions of 1,4-dioxane, HCl, and TTIP, inorganic block copolymer composite films containing a variety of different morphologies are obtained. On the basis of the results a ternary phase diagram of the morphologies is mapped. By calcination, anatase TiO2 films are achieved. The morphologies and crystallographic phase of the films are studied with AFM, SEM, and XRD, respectively, and the formation mechanisms of the different morphologies are discussed.