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. 2006 May 1;31(9):1214-6.
doi: 10.1364/ol.31.001214.

Sub-38 nm resolution tabletop microscopy with 13 nm wavelength laser light

G Vaschenko  1 , C Brewer, F Brizuela, Y Wang, M A Larotonda, B M Luther, M C Marconi, J J Rocca, C S Menoni, E H Anderson, W Chao, B D Harteneck, J A Liddle, Y Liu, D T Attwood
Affiliations

Sub-38 nm resolution tabletop microscopy with 13 nm wavelength laser light

G Vaschenko et al. Opt Lett. .

Abstract

We have acquired images with a spatial resolution better than 38 nm by using a tabletop microscope that combines 13 nm wavelength light from a high-brightness tabletop laser and Fresnel zone plate optics. These results open a gateway to the development of compact and widely available extreme-ultraviolet imaging tools capable of inspecting samples in a variety of environments with a 15-20 nm spatial resolution and a picosecond time resolution.

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