Layer-in-layer hierarchical nanostructures fabricated by combining holographic polymerization and block copolymer self-assembly

Abstract

We report the combination of top-down and bottom-up nanomanufacturing techniques to fabricate active, hierarchically structured volume reflection gratings. Holographic polymerization (H-P) formed lamellar structures of approximately 200 nm in thickness, confining a block copolymer (BCP) to approximately 100 nm domains. Subsequently, the BCP self-assembles into nanolayers with a period of approximately 21 nm. We envisage that this approach opens a gateway to fabricating hierarchical nanostructures at different length scales.