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. 2000 Jun 20;39(18):3165-9.
doi: 10.1364/ao.39.003165.

Nonlinear absorption of thin Al2O3 films at 193 nm

O Apel  1 , K Mann, A Zoeller, R Goetzelmann, E Eva
Affiliations

Nonlinear absorption of thin Al2O3 films at 193 nm

O Apel et al. Appl Opt. .

Abstract

Absorption of thin Al2O3 films was measured at 193 nm with an ArF-laser calorimeter. In addition to the expected high linear absorption coefficient, we found, for the first time to our knowledge, that two-photon absorption and transient color-center formation are nonnegligible loss channels in thin films at 193 nm. The nonlinear absorption coefficient is of the order of several times 10(-4) cm/W.

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