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. 2008 Oct 13;16(21):16877-88.
doi: 10.1364/oe.16.016877.

Si lattice parameter measurement by centimeter X-ray interferometry

Luca Ferroglio  1 , Giovanni Mana, Enrico Massa
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Free article

Si lattice parameter measurement by centimeter X-ray interferometry

Luca Ferroglio et al. Opt Express. .
Free article

Abstract

A combined X-ray and optical interferometer capable of centimeter displacements has been made to measure the lattice parameter of Si crystals to within a 3 x 10(-9) relative uncertainty. This paper relates the results of test measurements carried out to assess the capabilities of the apparatus.

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