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. 2004 May 10;63(1):33-9.
doi: 10.1016/j.talanta.2003.11.020.

Towards advanced chemical microsensors-an overview

W Wróblewski  1 , A Dybko, E Malinowska, Z Brzózka
Affiliations

Towards advanced chemical microsensors-an overview

W Wróblewski et al. Talanta. .

Abstract

The paper presents design and performance of miniaturized chemical sensors based on silicon transducers: ion-sensitive field effect transistor (ISFET) and solid-state electrode (SSE). The sensors were fabricated as back-side contact structures, which facilitate their mounting in a flow-cell. The role of an intermediate layer between the transducer and the ion-selective membrane is discussed. Various polymeric matrices were used to manufacture microsensors: polysiloxanes, polyacrylates (polymethacrylates), polyurethanes.

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