Applied physics. Two beams squeeze feature sizes in optical lithography

Affiliations

¹ School of Chemistry and Biochemistry and Center for Organic Photonics and Electronics, Georgia Institute of Technology, Atlanta, GA 30332, USA. joe.perry@gatech.edu.

Comment

Joseph W Perry. Science. 2009.

. 2009 May 15;324(5929):892-3.

doi: 10.1126/science.1174224.

¹ School of Chemistry and Biochemistry and Center for Organic Photonics and Electronics, Georgia Institute of Technology, Atlanta, GA 30332, USA. joe.perry@gatech.edu.

No abstract available

Comment on

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