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. 2007 Dec 10;15(25):17106-13.
doi: 10.1364/oe.15.017106.

Ultra-compact, low RF power, 10 Gb/s silicon Mach-Zehnder modulator

William M Green, Michael J Rooks, Lidija Sekaric, Yurii A Vlasov
Free article

Ultra-compact, low RF power, 10 Gb/s silicon Mach-Zehnder modulator

William M Green et al. Opt Express. .
Free article

Abstract

Silicon p(+)-i-n(+) diode Mach-Zehnder electrooptic modulators having an ultra-compact length of 100 to 200 mum are presented. These devices exhibit high modulation efficiency, with a V(pi)L figure of merit of 0.36 V-mm. Optical modulation at data rates up to 10 Gb/s is demonstrated with low RF power consumption of only 5 pJ/bit.

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