Skip to main page content
U.S. flag

An official website of the United States government

Dot gov

The .gov means it’s official.
Federal government websites often end in .gov or .mil. Before sharing sensitive information, make sure you’re on a federal government site.

Https

The site is secure.
The https:// ensures that you are connecting to the official website and that any information you provide is encrypted and transmitted securely.

Access keys NCBI Homepage MyNCBI Homepage Main Content Main Navigation
. 2010 Jan;81(1):013907.
doi: 10.1063/1.3291107.

Anodically bonded submicron microfluidic chambers

S Dimov  1 , R G Bennett, A Córcoles, L V Levitin, B Ilic, S S Verbridge, J Saunders, A Casey, J M Parpia
Affiliations

Anodically bonded submicron microfluidic chambers

S Dimov et al. Rev Sci Instrum. 2010 Jan.

Abstract

We demonstrate the use of anodic bonding to fabricate cells with characteristic size as large as 7 x 10 mm(2), with height of approximately 640 nm, and without any internal support structure. The cells were fabricated from Hoya SD-2 glass and silicon wafers, each with 3 mm thickness to maintain dimensional stability under internal pressure. Bonding was carried out at 350 degrees C and 450 V with an electrode structure that excluded the electric field from the open region. We detail fabrication and characterization steps and also discuss the design of the fill line for access to the cavity.

PubMed Disclaimer

LinkOut - more resources