Determination of the optical properties of thin films from single-angle reflectance measurements
- PMID: 20125566
- DOI: 10.1364/AO.12.001577
Determination of the optical properties of thin films from single-angle reflectance measurements
Abstract
A method is described for determining the refractive index and thickness of thin films using data from single-angle measurements of the intensity of linearly polarized light reflected from a growing film.