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. 1990 Sep 1;29(25):3694-8.
doi: 10.1364/AO.29.003694.

Peak reflectivity measurements of W/C, Mo/Si, and Mo/B(4)C multilayer mirrors in the 8-190-A range using both Kalpha line and synchrotron radiation

A P Zwicker, S P Regan, M Finkenthal, H W Moos, E B Saloman, R Watts, J R Roberts

Peak reflectivity measurements of W/C, Mo/Si, and Mo/B(4)C multilayer mirrors in the 8-190-A range using both Kalpha line and synchrotron radiation

A P Zwicker et al. Appl Opt. .

Abstract

Peak reflectivity measurements of W/C, Mo/Si, and Mo/B(4)C multilayer mirrors have been performed using line and synchrotron radiation in the 8-190 A wavelength range. Short wavelength measurements using a line source were corrected for nonmonochromatic and divergent incident radiation. Reflectivities of Mo/Si mirrors, measured with synchrotron radiation, ranged from 25 to 44% but decreased significantly around the Si absorption edge. Mo/B(4)C multilayer mirrors were measured that had peak reflectivities from 10 to 25% between 90 and 200 A and bandpasses as small as 3 A.

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