Simultaneous determination of the optical constants and thickness of very thin films by using soft-x-ray reflectance measurements

Abstract

A nonlinear, least-squares curve-fitting method is described that simultaneously determines the optical constants and the thickness of a very thin (≲ 100-Å) film from reflectance versus angle of incidence (R - θ) data measured in the soft-x-ray region. The method is applied to R - θ data obtained for very thin, sputtered films of carbon (65 Å thick) and gold (94 Å thick) at photon energies of 60-900 eV. The results show that the present method is capable of accurately determining the thickness of very thin films even for transparent materials, and that the obtained optical constants are in good agreement with values reported for films with a thickness of 1000 Å.