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. 1994 Sep 1;33(25):5869-74.
doi: 10.1364/AO.33.005869.

Platinum/carbon multilayer reflectors for soft-x-ray optics

G S Lodha, K Yamashita, T Suzuki, I Hatsukade, K Tamura, T Ishigami, S Takahama, Y Namba

Platinum/carbon multilayer reflectors for soft-x-ray optics

G S Lodha et al. Appl Opt. .

Abstract

We have fabricated platinum/carbon (Pt/C) multilayer reflectors with 2d spacaings between 50 and 200 Å, using an electron-beam evaporator. We investigated the effects of 2d values, the number of layer pairs, substrate temperature, coatings, and the long-term stability on the reflectivity performance by using characteristic x rays and monochromatized synchrotron radiation in the 0.8-8-keV region. In this study we show that Pt/C multilayers with 10-20 layer pairs exhibit high and stable soft-x-ray reflectivity. The interfacial roughness was measured in the range of 5 Å and becomes lower for structures deposited at liquid-nitrogen temperatures. Coating these reflectors with a 100-Å-thick platinum layer increased the grazing angle reflectivity without significantly lowering the Bragg peak reflectivity.

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