A review of monolithic multichannel quartz crystal microbalance: a review

Abstract

Monolithic multichannel quartz crystal microbalance (MQCM) is an emerging technology for advanced sensing and measurement applications. In this report, a comprehensive review of MQCM technology is presented. Firstly, basic MQCM's design, simulation and characterization with emphasis on acoustic interference are described. Next, various MQCM schemes to minimize interference and enhance sensitivity of conventional MQCM devices based on modification of quartz substrate structure are digested. These include mesa, convex and x-axis inversion structures. Three important MQCM sensing platforms and their application areas are then discussed. These comprise MQCM as a static multichannel detector, series MQCM as a multichannel detector for the flow injection analysis and multi-frequency QCM for multi-sensitivity/multi-dynamic range detection. Finally, potential MQCM applications including electronic noses, bio-sensor arrays, and photocatatalytic measurement are illustrated and prospective MQCM applications including electronic tongues and electrochemical measurement are suggested.