Optomechanical trampoline resonators

Abstract

We report on the development of optomechanical "trampoline" resonators composed of a tiny SiO(2)/Ta(2)O(5) dielectric mirror on a silicon nitride micro-resonator. We observe optical finesses of up to 4 × 10(4) and mechanical quality factors as high as 9 × 10(5) in relatively massive (~100 ng) and low frequency (10-200 kHz) devices. This results in a photon-phonon coupling efficiency considerably higher than previous Fabry-Perot-type optomechanical systems. These devices are well suited to ultra-sensitive force detection, ground-state optical cooling experiments, and demonstrations of quantum dynamics for such systems.