UV optical properties of thin film oxide layers deposited by different processes
- PMID: 22016226
- DOI: 10.1364/AO.50.005559
UV optical properties of thin film oxide layers deposited by different processes
Abstract
UV optical properties of thin film layers of compound and mixed oxide materials deposited by different processes are presented. Japan Electron Optics Laboratory plasma ion assisted deposition (JEOL PIAD), electron beam with and without IAD, and pulsed DC magnetron sputtering were used. Comparisons are made with published deposition process data. Refractive indices and absorption values to as short as 145 nm were measured by spectroscopic ellipsometry (SE). Electronic interband defect states are detected that are deposition-process dependent. SE might be effective in identifying UV optical film quality, especially in defining processes and material composition beneficial for high-energy excimer laser applications and environments requiring stable optical properties.
Similar articles
-
Mixed oxide coatings for optics.Appl Opt. 2011 Mar 20;50(9):C69-74. doi: 10.1364/AO.50.000C69. Appl Opt. 2011. PMID: 21460985
-
Optical properties of laser-deposited a-Ge films: a comparison with sputtered and e-beam-deposited films.Appl Opt. 1992 Oct 1;31(28):6133-8. doi: 10.1364/AO.31.006133. Appl Opt. 1992. PMID: 20733819
-
Thin film and interface properties during ZnO deposition onto high-barrier hybrid/PET flexible substrates.Micron. 2009 Jan;40(1):130-4. doi: 10.1016/j.micron.2008.02.005. Epub 2008 Feb 16. Micron. 2009. PMID: 18406620
-
Thin Film Deposition Using Energetic Ions.Materials (Basel). 2010 Jul 29;3(8):4109-4141. doi: 10.3390/ma3084109. Materials (Basel). 2010. PMID: 28883323 Free PMC article. Review.
-
Samarium Monosulfide (SmS): Reviewing Properties and Applications.Materials (Basel). 2017 Aug 16;10(8):953. doi: 10.3390/ma10080953. Materials (Basel). 2017. PMID: 28813006 Free PMC article. Review.
Cited by
-
SiNx/SiO2-Based Fabry-Perot Interferometer on Sapphire for Near-UV Optical Gas Sensing of Formaldehyde in Air.Sensors (Basel). 2024 Jun 3;24(11):3597. doi: 10.3390/s24113597. Sensors (Basel). 2024. PMID: 38894388 Free PMC article.
LinkOut - more resources
Full Text Sources