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. 2012 May 2;24(17):2320-5.
doi: 10.1002/adma.201104798. Epub 2012 Mar 30.

Synthesis of large-area MoS2 atomic layers with chemical vapor deposition

Yi-Hsien Lee  1 , Xin-Quan Zhang, Wenjing Zhang, Mu-Tung Chang, Cheng-Te Lin, Kai-Di Chang, Ya-Chu Yu, Jacob Tse-Wei Wang, Chia-Seng Chang, Lain-Jong Li, Tsung-Wu Lin
Affiliations

Synthesis of large-area MoS2 atomic layers with chemical vapor deposition

Yi-Hsien Lee et al. Adv Mater. .

Abstract

Large-area MoS(2) atomic layers are synthesized on SiO(2) substrates by chemical vapor deposition using MoO(3) and S powders as the reactants. Optical, microscopic and electrical measurements suggest that the synthetic process leads to the growth of MoS(2) monolayer. The TEM images verify that the synthesized MoS(2) sheets are highly crystalline.

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