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. 2012 Apr 23;20(9):9777-83.
doi: 10.1364/OE.20.009777.

Real space soft x-ray imaging at 10 nm spatial resolution

W Chao  1 , P Fischer, T Tyliszczak, S Rekawa, E Anderson, P Naulleau
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Real space soft x-ray imaging at 10 nm spatial resolution

W Chao et al. Opt Express. .

Abstract

Using Fresnel zone plates made with our robust nanofabrication processes, we have successfully achieved 10 nm spatial resolution with soft x-ray microscopy. The result, obtained with both a conventional full-field and scanning soft x-ray microscope, marks a significant step forward in extending the microscopy to truly nanoscale studies.

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