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. 2012;12(4):4051-64.
doi: 10.3390/s120404051. Epub 2012 Mar 27.

A novel integrated multifunction micro-sensor for three-dimensional micro-force measurements

Weizhong Wang  1 , Yulong Zhao, Yafei Qin
Affiliations

A novel integrated multifunction micro-sensor for three-dimensional micro-force measurements

Weizhong Wang et al. Sensors (Basel). 2012.

Abstract

An integrated multifunction micro-sensor for three-dimensional micro-force precision measurement under different pressure and temperature conditions is introduced in this paper. The integrated sensor consists of three kinds of sensors: a three-dimensional micro-force sensor, an absolute pressure sensor and a temperature sensor. The integrated multifunction micro-sensor is fabricated on silicon wafers by micromachining technology. Different doping doses of boron ion, placement and structure of resistors are tested for the force sensor, pressure sensor and temperature sensor to minimize the cross interference and optimize the properties. A glass optical fiber, with a ladder structure and sharp tip etched by buffer oxide etch solution, is glued on the micro-force sensor chip as the tactile probe. Experimental results show that the minimum force that can be detected by the force sensor is 300 nN; the lateral sensitivity of the force sensor is 0.4582 mV/μN; the probe length is linearly proportional to sensitivity of the micro-force sensor in lateral; the sensitivity of the pressure sensor is 0.11 mv/KPa; the sensitivity of the temperature sensor is 5.836 × 10(-3) KΩ/°C. Thus it is a cost-effective method to fabricate integrated multifunction micro-sensors with different measurement ranges that could be used in many fields.

Keywords: glass optical fiber probe; integrated sensor; micro-force; pressure; temperature.

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Figures

Figure 1.
Figure 1.
Cross-sectional view and the dimensions of the integrated sensor. (a) Cross-sectional view; (b) Dimensions.
Figure 2.
Figure 2.
The strain distribution of the micro-force sensor. (a) Force (3 mN) applied in X or Y orientation; (b) Force (10 mN) applied in Z orientation
Figure 3.
Figure 3.
The deformation of the micro-force sensor with pressure 200 KPa applied on it. (a) The displacement distribution; (b) The strain distribution.
Figure 4.
Figure 4.
The piezoresistance coefficient versus boron ion doping dose and temperature.
Figure 5.
Figure 5.
The process of fabricating the micro-sensor chip.
Figure 6.
Figure 6.
The digital microscopy of finished sensor chip: (a) the resistor of the pressure sensor; (b) the temperature sensor and the absolute pressure sensor; (c) the integrated sensor chip.
Figure 7.
Figure 7.
The pictures of the finished sensor. (a) The digital microscopy of finished probe tip; (b) The digital photograph of the finished sensor.
Figure 8.
Figure 8.
The characteristic curves of the sensors. (a) The pressure sensor; (b) The temperature sensor.
Figure 9.
Figure 9.
The output voltage of the micro-force sensor versus applied force. (a) Applied force in X orientation; (b) Applied force in Y orientation; (c) Applied force in Zorientation.
Figure 9.
Figure 9.
The output voltage of the micro-force sensor versus applied force. (a) Applied force in X orientation; (b) Applied force in Y orientation; (c) Applied force in Zorientation.
Figure 10.
Figure 10.
The sensitivity of the micro-force sensor in X-axis versus the length of the probe.
Figure 11.
Figure 11.
The overload curves of the sensor in Z orientation.
See this image and copyright information in PMC

References

    1. Gao W., Motoki T., Kiyono S. Nanometer edge profile measurement of diamond cutting tools by atomic force microscope with optical alignment sensor. Precision Eng. 2006;30:396–405.
    1. Kim K., Cheng J., Liu Q., Wu X. Y., Sun Y. Investigation of mechanical properties of soft hydrogel microcapsules in relation to protein delivery using a MEMS force sensor. J. Biomed. Mater. Res. 2010;Part A92A:103–113. - PubMed
    1. Trejos A.L., Jayaraman S., Patel R.V., Naish M.D., Schlachta C.M. Force sensing in natural orifice transluminal endoscopic surgery. Surg. Endosc. 2011;25:186–192. - PubMed
    1. Li B., Wang J.H.C. Application of sensing techniques to cellular force measurement. Sensors. 2010;10:9948–9962. - PMC - PubMed
    1. Bartsch M.S., Federle W., Full R.J., Kenny T.W. A multiaxis force sensor for the study of insect biomechanics. J. Microelectromech. Syst. 2007;16:709–718.

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