Next-generation nanotechnology laboratories with simultaneous reduction of all relevant disturbances

Abstract

The tremendous variety of nanotechnology experiments and tools to fabricate and characterize ever-smaller structures down to molecular or even atomic scales leads to stringent demands for appropriate, so-called "silent", premises that allow such susceptible experiments to be conducted. Reducing dimensions means smaller absolute optical and electrical signal levels, and consequently reduced signal-to-noise ratios. Hence, in addition to short-range disturbances inside the laboratory, remote long-range noise sources have to be considered for next-generation laboratories that aim at screening the disturbances and keeping the remaining values at utmost constancy. We present a novel laboratory concept that addresses simultaneously all the disturbances relevant for nanotechnology, namely, vibrations, electro-magnetic fields, temperature, humidity, and sound. Particular attention was paid to tackling the mutual derogation of the various measures to enable unprecedented performance of the novel research platform.