Fabrication of large-sized two-dimensional ordered surface array with well-controlled structure via colloidal particle lithography

Abstract

Epoxy resin coated glass slides were used for colloidal particle lithography, in order to prepare well-defined 2D surface arrays. Upon the assistance of a large-sized 2D colloidal single crystal as template, centimeter-sized ordered surface arrays of bowl-like units were obtained. Systematic studies revealed that the parameters of obtained surface arrays could be readily controlled by some operational factors, such as temperature, epoxy resin layer thickness, and template particle size. With epoxy resin substituting for normal linear polymer, the height/diameter ratio of bowls in the formed surface arrays can be largely increased. With further reactive plasma etching, the parameters of ordered surface arrays could be finely tuned through controlling etching time. This study provides a facile way to prepare large-sized 2D surface arrays with tunable parameters.