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. 2014 Oct;26(38):6554-9.
doi: 10.1002/adma.201402028. Epub 2014 Aug 8.

Element specific monolayer depth profiling

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Element specific monolayer depth profiling

Sebastian Macke et al. Adv Mater. 2014 Oct.

Abstract

The electronic phase behavior and functionality of interfaces and surfaces in complex materials are strongly correlated to chemical composition profiles, stoichiometry and intermixing. Here a novel analysis scheme for resonant X-ray reflectivity maps is introduced to determine such profiles, which is element specific and non-destructive, and which exhibits atomic-layer resolution and a probing depth of hundreds of nanometers.

Keywords: complex functional materials; depth profiling; non-destructive characterization; resonant X-ray reflectivity; thin film heterostructures.

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