Element specific monolayer depth profiling
- PMID: 25103570
- DOI: 10.1002/adma.201402028
Element specific monolayer depth profiling
Abstract
The electronic phase behavior and functionality of interfaces and surfaces in complex materials are strongly correlated to chemical composition profiles, stoichiometry and intermixing. Here a novel analysis scheme for resonant X-ray reflectivity maps is introduced to determine such profiles, which is element specific and non-destructive, and which exhibits atomic-layer resolution and a probing depth of hundreds of nanometers.
Keywords: complex functional materials; depth profiling; non-destructive characterization; resonant X-ray reflectivity; thin film heterostructures.
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