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. 2014 Sep 4;9(1):471.
doi: 10.1186/1556-276X-9-471. eCollection 2014.

Digital holographic microscopy based on a modified lateral shearing interferometer for three-dimensional visual inspection of nanoscale defects on transparent objects

Kwang-Beom Seo  1 , Byung-Mok Kim  1 , Eun-Soo Kim  1
Affiliations

Digital holographic microscopy based on a modified lateral shearing interferometer for three-dimensional visual inspection of nanoscale defects on transparent objects

Kwang-Beom Seo et al. Nanoscale Res Lett. .

Abstract

A new type of digital holographic microscopy based on a modified lateral shearing interferometer (LSI) is proposed for the detection of micrometer- or nanometer-scale defects on transparent target objects. The LSI is an attractive interferometric test technique because of its simple configuration, but it suffers from the so-called 'duplicate image' problem, which originates from the interference of two sheared object beams. In order to overcome this problem, a modified LSI system, which employs a new concept of subdivided two-beam interference (STBI), is proposed. In this proposed method, an object beam passing through a target object is controlled and divided into two areas with and without object information, which are called half-object and half-reference beams, respectively. Then, these two half-beams make an interference pattern just like most two-beam interferometers. Successful experiments with a test glass panel for mobile displays confirm the feasibility of the proposed method and suggest the possibility of its practical application to the visual inspection of micrometer- or nanometer-scale defects on transparent objects.

Keywords: Defect detection of transparent materials; Depth and phase measurement and metrology; Digital holographic microscopy; Lateral shearing interferometer; Three-dimensional visual inspection.

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Figures

Figure 1
Figure 1
Configuration of the conventional LSI system.
Figure 2
Figure 2
Detailed description of the interference pattern generated in the conventional LSI system.
Figure 3
Figure 3
Experimental setup for the proposed LSI-based DHM system.
Figure 4
Figure 4
A new concept of subdivided two-beam interference.
Figure 5
Figure 5
Lateral shearing distance between two object beams.
Figure 6
Figure 6
An EIA with two half-object and half-reference beams.
Figure 7
Figure 7
Operational flowchart of the proposed system.
Figure 8
Figure 8
External view and its magnified image of the test touch-glass panel. (a) External view and (b) magnified image (×10).
Figure 9
Figure 9
Experimental results of the conventional system. (a) Recorded hologram, (b) reconstructed intensity image, and (c) reconstructed phase image.
Figure 10
Figure 10
Reconstructed line-scratch images of the touch-glass panel of the conventional system. (a) 1-D image, (b) 2-D image, and (c) 3-D image.
Figure 11
Figure 11
Experimental results of the proposed system. (a) Recorded hologram, (b) reconstructed intensity image, and (c) reconstructed phase image.
Figure 12
Figure 12
Reconstructed line-scratch images of the touch-glass panel of the proposed system. (a) 1-D image, (b) 2-D image, and (c) 3-D image.
Figure 13
Figure 13
Reconstructed real dig image of the touch-glass panel of the conventional system. (a) Recorded hologram and (b) 3-D reconstructed image.
Figure 14
Figure 14
Reconstructed dig image of the touch-glass panel of the conventional system. (a) 1-D image and (b) 2-D image.
Figure 15
Figure 15
Reconstructed dig images of the touch-glass panel of the proposed system. (a) Recorded hologram and its (b) 3-D image.
Figure 16
Figure 16
Reconstructed dig images of the touch-glass panel of the proposed system. (a) 1-D image and (b) 2-D image.
See this image and copyright information in PMC

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