Chemical Vapor Deposition of Large-Sized Hexagonal WSe₂ Crystals on Dielectric Substrates
- PMID: 26414106
- DOI: 10.1002/adma.201503446
Chemical Vapor Deposition of Large-Sized Hexagonal WSe₂ Crystals on Dielectric Substrates
Abstract
High-quality large-sized hexagoal WSe2 crystals can be grown on dielectric substrates using atmospheric chemical vapor deposition in the presence of hydrogen gas. These hexagonal crystals (lateral width >160 um) have a carrier mobility of 100 cm(2) V(-1) s(-1) and a photoresponsivity of ≈1100 mA W(-1), which is comparable to that of exfoliated flakes.
Keywords: hexagonal crystals; transition metal dichalcogenides; tungsten diselenide.
© 2015 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.
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