Layered Gold and Titanium Dioxide Substrates for Improved Surface Enhanced Raman Spectroscopic Sensing

Abstract

This manuscript describes a simple process for fabricating gold-based, multi-layered, surface-enhanced Raman scattering (SERS) substrates that can be applied to a variety of different nanostructures, while still providing multi-layer enhancement factors comparable to those previously achieved only with optimized silver/silver oxide/silver substrates. In particular, gold multi-layered substrates generated by atomic layer deposition (ALD) have been fabricated and characterized in terms of their optimal performance, revealing multi-layer enhancements of 2.3-fold per spacer layer applied. These substrates were fabricated using TiO2 as the dielectric spacer material between adjacent gold layers, with ALD providing a conformal thin film with high surface coverage and low thickness. By varying the spacer layer thicknesses from sub-monolayer (non-contiguous) films through multiple TiO2 layer thick films, the non-monotonic spacer layer thickness response has been elucidated, revealing the importance of thin, contiguous dielectric spacer layers for optimal enhancement. Furthermore, the extended shelf life of these gold multi-layered substrates was characterized, demonstrating usable lifetimes (i.e. following storage in ambient conditions) of greater than five months, with the further potential for simple limited electrochemical regeneration even after this time.

Keywords: ALD; Multi-layer SERS; atomic layer deposition; surface enhanced raman scattering.