Applied physics: 3D imaging for microchips
- PMID: 28300116
- DOI: 10.1038/543325a
Applied physics: 3D imaging for microchips
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High-resolution non-destructive three-dimensional imaging of integrated circuits.Nature. 2017 Mar 15;543(7645):402-406. doi: 10.1038/nature21698. Nature. 2017. PMID: 28300088
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