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. 2007 Dec 4;7(12):3071-3083.
doi: 10.3390/s7123071.

Three Cavity Tunable MEMS Fabry Perot Interferometer

Avinash Parashar  1 , Ankur Shah  2 , Muthukumaran Packirisamy  2 , Narayanswamy Sivakumar  2
Affiliations

Three Cavity Tunable MEMS Fabry Perot Interferometer

Avinash Parashar et al. Sensors (Basel). .

Abstract

In this paper a four-mirror tunable micro electro-mechanical systems (MEMS)Fabry Perot Interferometer (FPI) concept is proposed with the mathematical model. Thespectral range of the proposed FPI lies in the infrared spectrum ranging from 2400 to 4018(nm). FPI can be finely tuned by deflecting the two middle mirrors (or by changing the threecavity lengths). Two different cases were separately considered for the tuning. In case one,tuning was achieved by deflecting mirror 2 only and in case two, both mirrors 2 and 3 weredeflected for the tuning of the FPI.

Keywords: Fabry Perot Interferometer; Full width Half Maximum; IR Spectroscopy; MEMS.

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Figures

Figure 1.
Figure 1.
The amplitudes transmission and reflection at ith mirror, (i + 1)th up to N mirrors.
Figure 2.
Figure 2.
(a) Fabrication of one part of FPI with one movable and one fixed mirror (b) Another symmetric part of the four-mirror FPI with one movable mirror and one fixed. (c) Proposed four Mirror FPI schematic.
Figure 3.
Figure 3.
Spectral response of three cavity FPI with different cavity lengths of 600nm, 700nm and 800nm.
Figure 4.
Figure 4.
Schematic Diagram of four-Mirror FPI.
Figure 5.
Figure 5.
Spectral response of FPI when tuned by deflecting mirror 2 by Δ1 and keeping Δ2 at zero for all the responses.
Figure 6.
Figure 6.
Spectral response of FPI when tuned by deflecting two middle mirrors 2 and 3 by equal deflection Δ1 = Δ2 for each tuned position.
Figure 7.
Figure 7.
Tuned wavelength in nanometer is plotted corresponding to each independent deflection Δ1 and Δ2 in mirrors 2 and 3 respectively.
Figure 8.
Figure 8.
FWHM is plotted for each tuned wavelength corresponding to independent deflections in two middle mirrors.
See this image and copyright information in PMC

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