"Infinite Sensitivity" of Black Silicon Ammonia Sensor Achieved by Optical and Electric Dual Drives

Abstract

The microstructured and hyperdoped silicon as a superior photoelectric and photovoltaic material is first studied as a gas-sensing material. The material is prepared by femtosecond-laser irradiation on selenium-coated silicon and then fabricated as a conductive gas sensor, targeting ammonia. At room temperature, the sensitivity, response time, repeatability, distinguishability, selectivity, and natural aging effect of the sensor have been systematically studied. Results show that such black silicon has good potential for application as an ammonia-sensing material. On the basis of its unique optoelectronic properties, an additional optical drive is proposed for the formation of an optical and electric dual-driven sensor, which is achieved by asymmetric light illumination between the two electrode regions. In a certain range of applied voltage, the sensitivity is enhanced dramatically and even tends to be infinite. For the aged device with degraded sensitivity, a two-order increment is obtained for 500 ppm of NH₃ under the extra optical drive. A mechanism based on Dember effect is proposed for explaining such a phenomenon.

Keywords: Dember effect; ammonia sensors; dual drives; femtosecond-laser microstructured silicon; gas-sensing mechanism.