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Review
. 1998 Mar 16;37(5):550-575.
doi: 10.1002/(SICI)1521-3773(19980316)37:5<550::AID-ANIE550>3.0.CO;2-G.

Soft Lithography

Younan Xia  1 , George M Whitesides  1
Affiliations
Review

Soft Lithography

Younan Xia et al. Angew Chem Int Ed Engl. .

Abstract

Elastomeric stamps and molds provide a great opportunity to eliminate some of the disadvantages of photolithograpy, which is currently the leading technology for fabricating small structures. In the case of "soft lithography" there is no need for complex laboratory facilities and high-energy radiation. Therefore, this process is simple, inexpensive, and accessible even to molecular chemists. The current state of development in this promising area of research is presented here.

Keywords: Elastomers; Materials science; Patterning; Supramolecular chemistry.

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