Mid-Infrared Chalcogenide Waveguides for Real-Time and Nondestructive Volatile Organic Compound Detection

Abstract

A mid-infrared (mid-IR) sensor chip was demonstrated for volatile organic compound (VOC) detection. The sensor consisted of As₂Se₃ optical waveguides built by microelectronic fabrication processes. The VOC sensing performance was characterized by measuring acetone and ethanol vapors at their characteristic C-H absorption from λ = 3.40 to 3.50 μm. Continuous VOC detection with <5 s response time was achieved by measuring the intensity attenuation of the waveguide mode. The miniaturized noninvasive VOC sensor can be applied to breath analysis and environmental toxin monitoring.