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. 2020 Jan 24;13(3):569.
doi: 10.3390/ma13030569.

High-Efficiency and Low-Damage Lapping Process Optimization

Ci Song  1 , Feng Shi  1 , Wanli Zhang  1 , Zhifan Lin  1 , Yuxuan Lin  1
Affiliations

High-Efficiency and Low-Damage Lapping Process Optimization

Ci Song et al. Materials (Basel). .

Abstract

The silica opticsare widely applied in the modern laser system, and its fabrication is always the research focus. In the manufacturing process, the lapping process occurs between grinding and final polishing. However, lapping processes optimizations focus on decreasing the depth of sub-surface damage (SSD) or improving lapping efficiency individually. So, the optimum balance point between efficiency and damageshould be studied further. This manuscript establishes the effective removal rate of damage (ERRD)model, and the relationship between the ERRD and processing parameters is simulated. Then, high-efficiency, low-damage lapping processing routine is established based on the simulation. The correctness and feasibility are validated. In this work, the optimized method is confirmed that it can improve efficiency and decrease damage layer depth in the lapping process which promotes the development of optics in low-damage fabrication.

Keywords: effective removal rate of damage; lapping process; low-damage fabrication; sub-surface damage.

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Conflict of interest statement

The authors declare no conflict of interest.

Figures

Figure 1
Figure 1
The schematic view of sub-surface damage (SSD) from grinding to polishing.
Figure 2
Figure 2
Interaction among abrasive, lapping plate and workpiece.
Figure 3
Figure 3
Micro-indentation mechanics.
Figure 4
Figure 4
The relationship between effective removal rate of damage (ERRD) and abrasive.
Figure 5
Figure 5
ERRD for various lapping pressure.
Figure 6
Figure 6
ERRD for different lapping velocity.
Figure 7
Figure 7
Results of ERRD with different abrasive.
Figure 8
Figure 8
Result of ERRD under different lapping velocity.
Figure 9
Figure 9
SSD results of sample 1.
Figure 10
Figure 10
SSD results of sample 2.
Figure 11
Figure 11
SSD results of sample 3.
Figure 12
Figure 12
SSD results of sample 4.
See this image and copyright information in PMC

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