High-precision tilt stage for the high-voltage electron microscope

Abstract

The high-voltage electron microscope is used to study thick samples (0.25 to several micrometers) to obtain three-dimensional information at ultrastructural resolution. Three-dimensional image reconstructions are often employed to extract, process and display this information. The sets of images used to form reconstructions must be recorded for precisely known specimen-beam orientations, especially if tomographic methods are employed. The design and operation of a precision (+/- 0.06 degrees) single-tilt stage to support this type of imaging is reported. All motions including two translations, height adjustment and tilting are accomplished via a single objective lens entry port. The specimen rod is supported on two rubber gaskets for vibration isolation, and motorized precision micrometers with encoder readouts for position monitoring drive the motions. The stage is stable to 0.6 nm for at least 16 s and is capable of tilt angles of +/- 70 degrees.