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. 2020 Nov 20;20(22):6660.
doi: 10.3390/s20226660.

Quantitative X-ray Channel-Cut Crystal Diffraction Wavefront Metrology Using the Speckle Scanning Technique

Lian Xue  1 , Hongxin Luo  1 , Qianshun Diao  2   3 , Fugui Yang  2 , Jie Wang  1 , Zhongliang Li  1
Affiliations

Quantitative X-ray Channel-Cut Crystal Diffraction Wavefront Metrology Using the Speckle Scanning Technique

Lian Xue et al. Sensors (Basel). .

Abstract

A speckle-based method for the X-ray crystal diffraction wavefront measurement is implemented, and the slope errors of channel-cut crystals with different surface characteristics are measured. The method uses a speckle scanning technique generated by a scattering membrane translated using a piezo motor to infer the deflection of X-rays from the crystals. The method provides a high angular sensitivity of the channel-cut crystal slopes in both the tangential and sagittal directions. The experimental results show that the slope error of different cutting and etching processes ranges from 0.25 to 2.98 μrad. Furthermore, the results of wavefront deformation are brought into the beamline for simulation. This method opens up possibilities for new high-resolution applications for X-ray crystal diffraction wavefront measurement and provides feedback to crystal manufacturers to improve channel-cut fabrication.

Keywords: X-ray crystal diffraction wavefront; channel-cut crystal; speckle-based method.

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Conflict of interest statement

The authors declare no conflict of interest.

Figures

Figure 1
Figure 1
Experimental arrangement and correlation principle for absolute metrology technique. (a) Speckle set-up for measuring channel cuts. Stacks of crystal (b) and reference (c) speckle images retrieved by the detector. (d) Cross-correlation map of the two patterns shown in (b,c).
Figure 2
Figure 2
(a1–a5) Photos of channel-cut crystals from CC1 to CC5. (b1–b5) The X-ray crystal morphology of five channel-cut crystals, and (c1–c5) the intensity profiles taken at the dashed lines.
Figure 3
Figure 3
(a1–a5) The vertical wavefront slope errors, and (b1–b5) slope errors corresponding to the black dashed line. (c1–c5) The residual height profile of slope errors in the meridional direction for five channel cuts.
Figure 4
Figure 4
(a) The slope errors of different CC1 vertical positions. For comparison, the red curve is shifted up by 1 µrad. (b) The slope errors of different CC5 vertical positions.
Figure 5
Figure 5
The layout of the beamline: VKB (vertical Kirkpatrick-Baez (KB) mirror) and HKB (horizontal KB mirror).
Figure 6
Figure 6
The plots of the intensity distribution with 15 μrad acceptance angle for (a,b) CC1, (c,d) CC4, and (e,f) CC5. The error was added separately for (a,c,e); no error on VKB.
Figure 7
Figure 7
The plots of the intensity distribution with 5 μrad acceptance angle for (a,b) CC1, (c,d) CC4, and (e,f) CC5. The error was added separately for (a,c,e); no error on VKB.
See this image and copyright information in PMC

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