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. 2021 Jun;282(3):224-238.
doi: 10.1111/jmi.12997. Epub 2021 Jan 29.

Estimation of an uncertainty budget and performance measurement for a dual-wavelength Twyman-Green interferometer

Dahi Ghareab Abdelsalam Ibrahim  1
Affiliations

Estimation of an uncertainty budget and performance measurement for a dual-wavelength Twyman-Green interferometer

Dahi Ghareab Abdelsalam Ibrahim. J Microsc. 2021 Jun.

Abstract

In this paper, the uncertainty budget from 10 sources we claim they have direct impact on measurement is estimated. The measurement has been applied to nominal step heights of 1.34 and 1.50 μm using a dual-wavelength Twyman-Green interferometer. Experimental results show that the measured step heights match with their nominal values with expanded uncertainty in the range of 5% from the object being measured. The performance of the measurement process over time has been estimated at different confidence levels and the obtained results show that the process is maintained in a state of statistical control. To the best of our knowledge, this is the first report for estimation of uncertainty budget from a synthetic wavelength.

Keywords: interferometry; metrology; surface measurements; unwrapping phase.

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References

REFERENCES

    1. Ibrahim, D. G. A. (2018). Steep large film thickness measurement with off-axis terahertz digital holography reconstructed by a direct fourier and hermite polynomial. Applied Optics, 57, 2533-2538.
    1. Yamagiwa, M., Minamikawa, T., Trovato, C., Ogawa, T., Ibrahim, D. G. A., Kawahito, Y., …Yasui, T. (2018). Multicascade-linked synthetic wavelength digital holography using an optical-comb referenced frequency synthesizer. Optics Express, 26, 26292-26306.
    1. Abdelsalam, D. G., Baek, B. J., & Kim, D. (2010). Surface form measurement using single shot off-axis fizeau interferometry. Journal of Optical Society of Korea, 14, 409-414.
    1. Abdelsalam, D. G., Baek, B. J., & Kim, D. (2012). An automatic processing technique for accurate surface form measurement. Optik, 123, 295-301.
    1. Abdelsalam, D. G., Baek, B. J., Kim, D. (2012). Curvature measurement using phase shifting in-line interferometry, single shot off-axis geometry and zernike's polynomial fitting. Optik, 123, 422-427.

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