Skip to main page content
U.S. flag

An official website of the United States government

Dot gov

The .gov means it’s official.
Federal government websites often end in .gov or .mil. Before sharing sensitive information, make sure you’re on a federal government site.

Https

The site is secure.
The https:// ensures that you are connecting to the official website and that any information you provide is encrypted and transmitted securely.

Access keys NCBI Homepage MyNCBI Homepage Main Content Main Navigation
Comment
. 2021 Feb;590(7844):E6-E7.
doi: 10.1038/s41586-020-03162-y. Epub 2021 Feb 3.

On the measured dielectric constant of amorphous boron nitride

Affiliations
Comment

On the measured dielectric constant of amorphous boron nitride

Lei Li et al. Nature. 2021 Feb.
No abstract available

PubMed Disclaimer

Comment in

Comment on

  • Ultralow-dielectric-constant amorphous boron nitride.
    Hong S, Lee CS, Lee MH, Lee Y, Ma KY, Kim G, Yoon SI, Ihm K, Kim KJ, Shin TJ, Kim SW, Jeon EC, Jeon H, Kim JY, Lee HI, Lee Z, Antidormi A, Roche S, Chhowalla M, Shin HJ, Shin HS. Hong S, et al. Nature. 2020 Jun;582(7813):511-514. doi: 10.1038/s41586-020-2375-9. Epub 2020 Jun 24. Nature. 2020. PMID: 32581381

References

    1. Hong, S. et al. Ultralow-dielectric-constant amorphous boron nitride. Nature 582, 511–514 (2020). - DOI
    1. IRDS. More Moore. In The International Roadmap for Devices and Systems: 2017 (IEEE, 2017); http://irds.ieee.org .
    1. Shamiryan, D., Abell, T., Iacopi, F. & Maex, K. Low-k dielectric materials. Mater. Today 7, 34–39 (2004). - DOI
    1. King, S. W. Dielectric barrier, etch stop, and metal capping materials for state of the art and beyond metal interconnects. ECS J. Solid State Sci. Technol. 4, N3029 (2015). - DOI
    1. Grill, A. PECVD low and ultralow dielectric constant materials: from invention and research to products. J. Vac. Sci. Technol. B 34, 020801 (2016). - DOI

LinkOut - more resources