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. 2020 Oct;29(5):1038-1043.
doi: 10.1109/jmems.2020.3010773. Epub 2020 Jul 28.

A Ceramic PZT-based PMUT Array for Endoscopic Photoacoustic Imaging

Haoran Wang  1 , Zhenfang Chen  2 , Hao Yang  3 , Huabei Jiang  3 , Huikai Xie  4
Affiliations

A Ceramic PZT-based PMUT Array for Endoscopic Photoacoustic Imaging

Haoran Wang et al. J Microelectromech Syst. 2020 Oct.

Abstract

In this paper, we present the design, fabrication, and characterization of a compact 4 × 4 piezoelectric micromachined ultrasonic transducer (pMUT) array and its application to photoacoustic imaging. The uniqueness of this pMUT array is the integration of a 4 μm-thick ceramic PZT, having significantly higher piezoelectric coefficient and lower stress than sol-gel or sputtered PZT. The fabricated pMUT array has a small chip size of only 1.8 × 1.6 mm2 with each pMUT element having a diameter of 210 μm. The fabricated device was characterized with electrical impedance measurement and acoustic sensing test. Photoacoustic imaging has also been successfully demonstrated on an agar phantom with a pencil lead embedded using the fabricated pMUT array.

Keywords: Ceramic PZT; Endoscopic Imaging; Microelectromechanical Systems; PMUT Array; Photoacoustic Imaging; Piezoelectric Micromachined Ultrasonic Transducers.

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Figures

Fig. 1.
Fig. 1.
3D model (a) and a cross-sectional view (b) of the designed pMUT array.
Fig. 2.
Fig. 2.
Process flow of the ceramic PZT-based pMUT array fabrication.
Fig. 3.
Fig. 3.
SEM images of the fabricated pMUT array: (a) front side, (b) backside, and (c) cross section of the thin membrane.
Fig. 4.
Fig. 4.
Measured impedances of the pMUT in air and water.
Fig. 5.
Fig. 5.
Schematic of the experimental setup with a photo of pMUTs integrated on a preamp PCB.
Fig. 6.
Fig. 6.
The pulse signal and the detected acoustic signal.
Fig. 7.
Fig. 7.
Frequency components of the pMUT signal.
Fig. 8.
Fig. 8.
Photoacoustic imaging experiment: (a) photo of the experimental setup and (b) reconstructed photoacoustic image.
See this image and copyright information in PMC

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