Design and analysis of four-jaws microgripper with integrated thermal actuator and force sensor for biomedical applications

Abstract

This research paper presents design and analysis of the multi-jaw microgripper that can manipulate microbiological organisms and species, cell probing and measurement, biomedical sample sorting, and preparation. Four jaws, actuated with a single thermal chevron actuator, can grip microbiological species ranging from 300 to 700 μm, 1 to 340 μm, 100 μm pool, and 1 to 120 μm spongy cells, respectively. Jaws are designed in such a way that they can grip regular, irregular, and spongy shaped biological species and their organelles. Parametric analysis of the microgripper exhibited that at 10 V, the efficiency of the thermal actuator is at maximum with respect to displacement, force, and temperature. To enhance displacement to voltage ratio and increase the energy efficiency, a class 3 lever mechanism has been incorporated. The amplification factors at four jaws are 17.21, 13.82, 4.02, and 4.93, respectively. For controlled application of the force to microspecies, two electrostatic force sensors have been amalgamated with jaws having capacitive sensitivities of 1.59 nf/μm, 1.91 nf/μm, 17 nf/μm, and 14.5 nf/μm, respectively. Electrothermal, static, and electrostatic analyses have been carried out with the finite element methods based software IntelliSuite^®. Stress magnitudes are within the limits of structural integrity of silicon having a factor of safety 2.5. Thermal analysis revealed that at a differential voltage of 10 V, the maximum temperature goes up to 425 °C. Buckling analysis results depicted that the critical load for the thermal actuator is 241 μN with the buckling load factor greater than unity. This paper focuses on microbiological applications only; however, the designed microgripper can be used to manipulate micro-objects, microstructures, microelectronics parts, and micro assembly.