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. 2022 Mar 1;47(5):1129-1132.
doi: 10.1364/OL.451064.

Dynamic spectroscopic imaging ellipsometry

Daesuk Kim, Vamara Dembele, Sukhyun Choi, Gukhyeon Hwang, Saeid Kheiryzadehkhanghah, Chulmin Joo, Robert Magnusson

Dynamic spectroscopic imaging ellipsometry

Daesuk Kim et al. Opt Lett. .

Abstract

A dynamic spectroscopic imaging ellipsometer (DSIE) employing a monolithic polarizing interferometer is described. The proposed DSIE system can provide spatio-spectral ellipsometric phase map data Δ(λ, x) dynamically at a speed of 30 Hz. We demonstrate the ultrafast mapping capability of the spectroscopic ellipsometer by measuring a patterned 8-inch full wafer with a spatial resolution of less than 50 × 50 µm2 in an hour.

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