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Review
. 2022 Aug 1;22(15):5748.
doi: 10.3390/s22155748.

Optical Fiber Probe Microcantilever Sensor Based on Fabry-Perot Interferometer

Yongzhang Chen  1   2 , Yiwen Zheng  2 , Haibing Xiao  3 , Dezhi Liang  2 , Yufeng Zhang  2 , Yongqin Yu  2 , Chenlin Du  2 , Shuangchen Ruan  2
Affiliations
Review

Optical Fiber Probe Microcantilever Sensor Based on Fabry-Perot Interferometer

Yongzhang Chen et al. Sensors (Basel). .

Abstract

Optical fiber Fabry-Perot sensors have long been the focus of researchers in sensing applications because of their unique advantages, including highly effective, simple light path, low cost, compact size, and easy fabrication. Microcantilever-based devices have been extensively explored in chemical and biological fields while the interrogation methods are still a challenge. The optical fiber probe microcantilever sensor is constructed with a microcantilever beam on an optical fiber, which opens the door for highly sensitive, as well as convenient readout. In this review, we summarize a wide variety of optical fiber probe microcantilever sensors based on Fabry-Perot interferometer. The operation principle of the optical fiber probe microcantilever sensor is introduced. The fabrication methods, materials, and sensing applications of an optical fiber probe microcantilever sensor with different structures are discussed in detail. The performances of different kinds of fiber probe microcantilever sensors are compared. We also prospect the possible development direction of optical fiber microcantilever sensors.

Keywords: Fabry–Perot cavity; fiber probe sensor; microcantilever; micromachining.

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Conflict of interest statement

The authors declare no conflict of interest.

Figures

Figure 1
Figure 1
The configuration of an optical fiber microcantilever sensor.
Figure 2
Figure 2
Experimental setup of the microcantilever probe readout system.
Figure 3
Figure 3
The fabrication process of a fiber-top microcantilever using FIB milling [44].
Figure 4
Figure 4
(a) Fabrication process of femtosecond-laser-assisted chemical etching. (b) SEM image of the fiber-top microcantilever [54].
Figure 5
Figure 5
(a) Laser-machined fiber microcantilever. (b) Displacement performance [55].
Figure 6
Figure 6
The polymer-based fiber-top microcantilever fabricated by TPP technology [59].
Figure 7
Figure 7
3D model of the glass ferrule-top cantilever [65].
Figure 8
Figure 8
Ferrule-top cantilever for Casimir force measurements [68].
Figure 9
Figure 9
Seismic accelerometer sensor based on X-shaped cantilever [75].
Figure 10
Figure 10
Microscope image of the hinged cantilever [86].
Figure 11
Figure 11
Three-view drawings of the fiber-side interferometer sensor [90].
Figure 12
Figure 12
Fiber-optic microcantilever-based vibration sensor [94].
Figure 13
Figure 13
The configuration of on-fiber EFPI vibration sensor [96].
See this image and copyright information in PMC

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