Terahertz time-domain ellipsometry: tutorial

Abstract

Ellipsometry is extensively used in the optical regime to investigate the properties of many materials as well as to evaluate with high precision the surface roughness and thickness of thin films and multilayered systems. Due to the inherent non-coherent detection technique, data analyses in optical ellipsometry tend to be complicated and require the use of a predetermined model, therefore indirectly linking the sample properties to the measured ellipsometric parameters. The aim of this tutorial is to provide an overview of terahertz (THz) time-domain ellipsometry, which is based instead on a coherent detection approach and allows in a simple and direct way the measurement of the material response. After giving a brief description of the technology presently used to generate and detect THz radiation, we introduce the general features of an ellipsometric setup operating in the time domain, putting in evidence similarities and differences with respect to the classical optical counterpart. To back up and validate the study, results of THz ellipsometric measurements carried out on selected samples are presented.