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. 2023 Feb 27;23(5):2615.
doi: 10.3390/s23052615.

An Interface ASIC Design of MEMS Gyroscope with Analog Closed Loop Driving

Huan Zhang  1 , Weiping Chen  1   2 , Liang Yin  1   2 , Qiang Fu  1   2
Affiliations

An Interface ASIC Design of MEMS Gyroscope with Analog Closed Loop Driving

Huan Zhang et al. Sensors (Basel). .

Abstract

This paper introduces a digital interface application-specific integrated circuit (ASIC) for a micro-electromechanical systems (MEMS) vibratory gyroscope. The driving circuit of the interface ASIC uses an automatic gain circuit (AGC) module instead of a phase-locked loop to realize a self-excited vibration, which gives the gyroscope system good robustness. In order to realize the co-simulation of the mechanically sensitive structure and interface circuit of the gyroscope, the equivalent electrical model analysis and modeling of the mechanically sensitive structure of the gyro are carried out by Verilog-A. According to the design scheme of the MEMS gyroscope interface circuit, a system-level simulation model including mechanically sensitive structure and measurement and control circuit is established by SIMULINK. A digital-to-analog converter (ADC) is designed for the digital processing and temperature compensation of the angular velocity in the MEMS gyroscope digital circuit system. Using the positive and negative diode temperature characteristics, the function of the on-chip temperature sensor is realized, and the temperature compensation and zero bias correction are carried out simultaneously. The MEMS interface ASIC is designed using a standard 0.18 μM CMOS BCD process. The experimental results show that the signal-to-noise ratio (SNR) of sigma-delta (ΣΔ) ADC is 111.56 dB. The nonlinearity of the MEMS gyroscope system is 0.03% over the full-scale range.

Keywords: MEMS gyroscope; circuit design; digital output; electrical model; on-chip temperature sensor.

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Conflict of interest statement

The authors declare no conflict of interest.

Figures

Figure 1
Figure 1
Mechanical model of MEMS gyroscope.
Figure 2
Figure 2
Schematic diagram of mechanically sensitive structure of MEMS gyroscope.
Figure 3
Figure 3
Equivalent electrical model of MEMS gyroscope.
Figure 4
Figure 4
Equivalent electrical model of mechanically sensitive structure of gyroscope.
Figure 5
Figure 5
Schematic diagram of gyroscope system-level simulation model.
Figure 6
Figure 6
System-level model of gyroscope driving circuit.
Figure 7
Figure 7
Simulation diagram of self-excited oscillation of the driving circuit.
Figure 8
Figure 8
System-level model of gyroscope sense circuit.
Figure 9
Figure 9
Sense circuit input and output simulation diagram: (a) Input angular velocity; (b) Analog output; (c) Digital output.
Figure 10
Figure 10
Topology structure of MEMS gyroscope interface circuit.
Figure 11
Figure 11
Schematic diagram of the AGC module of the driving circuit.
Figure 12
Figure 12
Circuit schematic diagram of the PI controller.
Figure 13
Figure 13
The transistor-level circuit structure diagram of nonlinear multiplier.
Figure 14
Figure 14
Positive temperature coefficient temperature sensor.
Figure 15
Figure 15
Negative temperature coefficient temperature sensor.
Figure 16
Figure 16
Circuit diagram of digital temperature compensation circuit module.
Figure 17
Figure 17
Schematic diagram of a fourth-order CIFF modulator.
Figure 18
Figure 18
Circuit diagram of a fourth-order CIFF ΣΔ modulator.
Figure 19
Figure 19
Power spectral density of the ΣΔ modulator.
Figure 20
Figure 20
MEMS gyroscope test circuit platform diagram: (a) MEMS gyroscope test circuit; (b) MEMS gyroscope ASIC layout.
Figure 21
Figure 21
MEMS gyroscope driving stability measurement results: (a) Driving detection voltage signal; (b) Driving test signal stability measured result.
Figure 22
Figure 22
Test result of MEMS gyroscope zero bias output.
Figure 23
Figure 23
MEMS gyroscope test circuit input and output test results: (a) The analog input and output result; (b) The digital input and output result.
See this image and copyright information in PMC

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