A High Dynamic Range Dual 8×16 Capacitive Sensor Array for Life Science Applications

Abstract

This paper presents a fully integrated complementary metal-oxide-semiconductor (CMOS) capacitive sensor array for life science applications. This sensing device consists of an array of 16 × 16 interdigitated electrodes (IDEs) integrated with a charge-based readout and multiplexing circuitries on the same chip. This chip was implemented in 0.35 μm AMS CMOS process. This sensing device has a wide input capacitance range (ICR) of about 100 fF and a resolution of 150 aF, and the capability of temporal, spatial, and dielectric sensing. It makes it possible to develop a low-cost, multimodal, calibration-free sensing platform for life science applications. Here, we demonstrate and discuss the functionality and applicability of the proposed sensing device by introducing various chemical solvents including ethanol, methanol, and pure water. The simulation and experimental results achieved in this work have taken us one step closer to a fully automated calibration-free multimodal capacitive sensing platform for high-throughput drug development and other purposes.